Quartz Boat(Tube) Cleaning Equipment
Product Name: Quartz Boat(Tube) Cleaning Equipment
Function: Used for the cleaning treatment of quartz boats and quartz tubes in boron diffusion, phosphorus diffusion, LPCVD, etc.
Process Flow: Pickling→Rinse→Drying
Features: The entire equipment is enclosed to prevent environmental pollution; the equipment features water-saving design and a function to collect overflow water from the rear tank for reuse in the spray tank; equipped with an automatic liquid supply and replenishment system with high accuracy.
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Product Name |
Quartz Boat(Tube) Cleaning Equipment |
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Model |
KSZDSYZ |
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Route Application |
TOPCON、PERC |
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Function |
Used for the cleaning treatment of quartz boats and quartz tubes in boron diffusion, phosphorus diffusion, LPCVD, etc. |
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Process Flow |
Pickling→Rinse→Drying |
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Compatible railboat |
"Small boat: 432mm221mm212mm (LWH) |
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Capacity |
42+ sets/day (Capacity can be customized based on requirements) |
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Power Consumption/ Voltage |
Main unit: 40KW/380V 50Hz 3-phase 5-wire system |
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Features |
The entire equipment is enclosed to prevent environmental pollution; the equipment features water-saving design and a function to collect overflow water from the rear tank for reuse in the spray tank; equipped with an automatic liquid supply and replenishment system with high accuracy. |